Parts For Sale TEGAL 32-538-001 TEGAL 32-538-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-538-001 Manufacturer TEGAL Part Number 32-538-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 58-073-001 40-481-002 Insulator Ring 40-467-001 42-362-001 47-101-002 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 93-123-006 BELT 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 52-047-002 150 mm 150 mm 25 slot Aluminum wafer carrier.
