Parts For Sale TEGAL 32-398-004 TEGAL 32-398-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-398-004 Manufacturer TEGAL Part Number 32-398-004 Description Status Available Approx. Qty 48 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 48.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 42-1033-001 39-741-026 Tegal 903e lower electrode 49-060-001 99-287-003 SHUTTLE INTERFACE BOARD 46-630-001 39-611-001 40-790-001 FOCUS RING 51-265-001 42-560-002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.