Parts For Sale TEGAL 32-267-004 TEGAL 32-267-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-267-004 Manufacturer TEGAL Part Number 32-267-004 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 46-879-001 47-583-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 47-695-001 41-362-002 32-415-002 40-304-001 ELECTRODE, INSULATOR LOWER 50-056-001 150 mm 150 mm 25 slot Aluminum wafer carrier.