Parts For Sale TEGAL 32-167-001 TEGAL 32-167-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-167-001 Manufacturer TEGAL Part Number 32-167-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 47-158-002 38-023-001 COOLING RING 80-650-053 ACTUATOR 40-395-001 RING, FLAT 6 41-351-003 44-634-001 46-925-001 37-524-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 40-296-001