Parts For Sale TEGAL 32-154-001 TEGAL 32-154-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-154-001 Manufacturer TEGAL Part Number 32-154-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 58-073-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 40-467-001 40-140-001 RING, CERAMIC INSULATOR 42-362-001 47-101-002 39-894-001 39-741-009 Tegal 903e lower electrode 52-047-002 80-202-357 O-Ring 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE
