Parts For Sale TEGAL 32-066-001 TEGAL 32-066-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-066-001 Manufacturer TEGAL Part Number 32-066-001 Description Status Available Approx. Qty 11 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 11.0 US Other TEGAL Parts 46-879-001 40-768-006 Insulator Ring 40-481-002 Insulator Ring 47-583-001 47-695-001 39-741-009 Tegal 903e lower electrode 41-362-002 32-415-002 50-056-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
