Parts For Sale TEGAL 32-066-001 TEGAL 32-066-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-066-001 Manufacturer TEGAL Part Number 32-066-001 Description Status Available Approx. Qty 11 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 11.0 US Other TEGAL Parts 42-1007-001 80-650-053 ACTUATOR 37-195-001 44-888-001 42-323-001 40-295-003 FOCUS RING 41-354-003 46-272-003 99-249-002 PCB TEGAL END POINT DETECTOR 40-304-001 ELECTRODE, INSULATOR LOWER