Parts For Sale TEGAL 30-252-001 TEGAL 30-252-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 30-252-001 Manufacturer TEGAL Part Number 30-252-001 Description PIN SUB ASS4 6500 Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 US Other TEGAL Parts 46-879-001 40-481-002 Insulator Ring 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 47-583-001 39-761-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 47-695-001 41-362-002 32-415-002 50-056-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 150 mm 150 mm 25 slot Aluminum wafer carrier.