Parts For Sale TEGAL 30-252-001 TEGAL 30-252-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 30-252-001 Manufacturer TEGAL Part Number 30-252-001 Description PIN SUB ASS4 6500 Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 US Other TEGAL Parts 42-1002-001 46-994-002 46-113-001 44-981-001 49-027-001 46-990-001 40-576-003-C Ring Ceramic Focus Castellated 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 55-008-001 BELT SPAT 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%