Parts For Sale TEGAL 23-198-005 TEGAL 23-198-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 23-198-005 Manufacturer TEGAL Part Number 23-198-005 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 80-650-053 ACTUATOR 42-426-001 40-140-001 RING, CERAMIC INSULATOR 47-339-005 52-050-001 42-852-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 58-046-001 39-750-001