Parts For Sale TEGAL 23-197-003 TEGAL 23-197-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 23-197-003 Manufacturer TEGAL Part Number 23-197-003 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 40-768-004 Insulator Ring 44-841-001 32-288-002 42-731-001 39-756-003 44-262-002 32-165-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 80-202-357 O-Ring 40-349-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
