Parts For Sale TEGAL 23-197-003 TEGAL 23-197-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 23-197-003 Manufacturer TEGAL Part Number 23-197-003 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 39-756-003 52-050-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 42-852-001 44-960-001 52-041-001 39-750-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 47-445-001