Parts For Sale TEGAL 23-185-001 TEGAL 23-185-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 23-185-001 Manufacturer TEGAL Part Number 23-185-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 47-158-002 39-861-002 80-650-053 ACTUATOR 41-351-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 46-925-001 37-524-001 32-388-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 150 mm 150 mm 25 slot Aluminum wafer carrier.