Parts For Sale TEGAL 23-181-005 TEGAL 23-181-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 23-181-005 Manufacturer TEGAL Part Number 23-181-005 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 46-879-001 40-395-001 RING, FLAT 6 47-583-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-695-001 41-362-002 32-415-002 50-056-001 37-222-002 Cooling Plate 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
