Parts For Sale TEGAL 23-181-003 TEGAL 23-181-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 23-181-003 Manufacturer TEGAL Part Number 23-181-003 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 46-879-001 47-583-001 40-295-003 FOCUS RING 47-695-001 99-249-002 PCB TEGAL END POINT DETECTOR 41-362-002 32-415-002 50-056-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 150 mm 150 mm 25 slot Aluminum wafer carrier.