Parts For Sale NOVELLUS FR51 NOVELLUS FR51 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS FR51 Manufacturer NOVELLUS Part Number FR51 Description GAUGE Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 JP Other NOVELLUS Parts 31-00114-00 RELAY,SOLID STATE,90A IDEC CORPORATION 31-00114-00 02-00315-01 Sense pin board 15-00457-00 SCREW, NICKEL, 10-32 x 24 HEATER ELECTRODE 15-00399-05 Screw 1.12LG Top spindle Ni 15-386933-00 Spring Door Lock Load 02-120403-00 ASSY, TC, 300MM, SPRING LOADED 10-103626-00 Tube Assy, Xdcr1 to A Manf 545*125*70mm 19-162063-00 19-162063-00 TRAZAR. HF BOX #2 15-256103-00 11688 NOVELLUS ANODE, GROOVED, BOLT DOWN, 200MM 00-678087-02 SS CLIP RING, 5" 21-051116-12 SCREW, SCHS 10-32X.75 SILVER (PACK of 10) 15-051711-30 15-051711-30 NOVELLUS TUBE