NOVELLUS Spare Parts



NOVELLUS C2
NOVELLUS C1-200 PECVD
NOVELLUS C1-150 PECVD
NOVELLUS 19-00154-03/C
NOVELLUS 15-00987-00
NOVELLUS 03-051714-00
NOVELLUS 17-135687-00
NOVELLUS 15-034958-00
NOVELLUS 15-120709-00
NOVELLUS 05-052185-00
NOVELLUS 17-111738-03
NOVELLUS 17-166354-00
NOVELLUS 10-029730-00
NOVELLUS 02-057703-00
NOVELLUS 15-144298-00
NOVELLUS 17-126156-00
NOVELLUS 21-041274-56
NOVELLUS 15-118390-00
NOVELLUS 02-135617-01
NOVELLUS 10-116156-66
NOVELLUS 04-732104-01
NOVELLUS 15-00758-00
NOVELLUS 15-327152-00
NOVELLUS 04-318177-00
NOVELLUS 27-134495-00
NOVELLUS 15-120399-00
NOVELLUS 10-114948-00
NOVELLUS 03-163895-00
NOVELLUS 02-00178-00
NOVELLUS 03-00093-01
NOVELLUS 04-718520-02
NOVELLUS 10-149368-00
NOVELLUS 10-033896-00
NOVELLUS 03-176779-00
NOVELLUS 04-714573-01
NOVELLUS 34-159551-00
NOVELLUS 15-07795-00
NOVELLUS 28-200438-00
NOVELLUS 05-021216-00
NOVELLUS 02-126829-00
NOVELLUS 20-01270-01
NOVELLUS 38-155090-00
NOVELLUS 66-601005-00
NOVELLUS 27-10106-00
NOVELLUS 22-02316-01
NOVELLUS 22-132010-00
NOVELLUS 27-10135-00
NOVELLUS 16-131100-00
NOVELLUS 60-129775-00
NOVELLUS 38-131790-00
NOVELLUS 76-176794-00
NOVELLUS 17-148001-00
NOVELLUS 17-00119-00
NOVELLUS 27-103559-00
NOVELLUS 27-001412-00
NOVELLUS 31-00059-00
NOVELLUS 16-024494-00
NOVELLUS 16-10302-00
NOVELLUS 71-625042-01
NOVELLUS 02-120201-00
NOVELLUS 02-29392-00
NOVELLUS 31-00058-04
NOVELLUS 60-148566-00
NOVELLUS 17-00260-00
NOVELLUS 11-266557-00
NOVELLUS 16-034312-02
NOVELLUS 03-00297-00
NOVELLUS 03-00139-05
NOVELLUS 17-131467-00
NOVELLUS 04-350398-00
NOVELLUS 11-265818-00
NOVELLUS 60-127804-01
NOVELLUS 02-117049-00
NOVELLUS 00-682249-00
NOVELLUS 03-810579-02
NOVELLUS 15-00744-00
NOVELLUS 02-029577-00
NOVELLUS 02-161289-00
NOVELLUS 17-10041-00
NOVELLUS 03-10676-00
NOVELLUS 17-043459-00
NOVELLUS 03-254616-00
NOVELLUS 30-11904-80
NOVELLUS 15-00469-00
NOVELLUS 03-122256-00
NOVELLUS 03-26758-00
NOVELLUS 02-047113-00
NOVELLUS 10-032974-00
NOVELLUS 15-131709-00
NOVELLUS 10-279110-00
NOVELLUS 03-273366-00
NOVELLUS 71-625025-00
NOVELLUS 27-26733-00
NOVELLUS 33-143209-00
NOVELLUS 16-133223-00
NOVELLUS 03-000022-07
NOVELLUS 03-166266-15
NOVELLUS 10-046141-00
NOVELLUS 16-00119-01
NOVELLUS 15-127164-00
NOVELLUS 15-024346-00
NOVELLUS 34-127175-00
NOVELLUS 15-136239-00
NOVELLUS 15-113239-00
NOVELLUS 10-108499-00
NOVELLUS 03-136309-01
NOVELLUS 03-266892-02
NOVELLUS 15-121004-00
NOVELLUS 03-141851-04
NOVELLUS 02-258524-00
NOVELLUS 71-219771-00
NOVELLUS 03-177100-02
NOVELLUS 03-028670-50
NOVELLUS 03-10746-00
NOVELLUS 15-020140-00
NOVELLUS 60-278845-00
NOVELLUS 15-119037-45
NOVELLUS 15-056179-00
NOVELLUS 02-138051-00
NOVELLUS 17-023006-00
NOVELLUS 02-107788-00
NOVELLUS 10-144203-00
NOVELLUS 10-279109-00
NOVELLUS 15-118391-00
NOVELLUS 03-834926-00
NOVELLUS 02-121444-00
NOVELLUS 28-189752-00
NOVELLUS 15-129885-10
NOVELLUS 03-029509-01
NOVELLUS 03-055896-00
NOVELLUS 17-133086-00
NOVELLUS 05-000145-00
NOVELLUS 27-110525-00
NOVELLUS 15-116157-00
NOVELLUS 10-034018-00
NOVELLUS 15-120582-00
NOVELLUS 03-166266-07
NOVELLUS 15-116136-00
NOVELLUS 15-053394-00
NOVELLUS 23-619922-00
NOVELLUS 17-133466-00
NOVELLUS 15-10550-00
NOVELLUS 40-053152-02
NOVELLUS 15-134638-00
NOVELLUS 27-121787-00
NOVELLUS 03-271666-00
NOVELLUS 17-028615-00
NOVELLUS 03-154201-00
NOVELLUS 10-132296-00
NOVELLUS 03-294790-00
NOVELLUS 03-810369-06
NOVELLUS 03-114682-07
NOVELLUS 15-047021-00
NOVELLUS 03-810369-07
NOVELLUS 00-670615-00
NOVELLUS 02-109699-00
NOVELLUS 15-055913-00
NOVELLUS 02-122732-00
NOVELLUS 16-03255-80
NOVELLUS 21-149737-00
NOVELLUS 15-165513-00
NOVELLUS 17-158004-00
NOVELLUS 71-161390-00
NOVELLUS 03-130489-00
NOVELLUS 03-124112-01
NOVELLUS 60-122672-00
NOVELLUS 16-257928-00
NOVELLUS 15-333722-01
NOVELLUS 02-383161-00
NOVELLUS 02-168358-00
NOVELLUS 16-144558-00
NOVELLUS 17-140885-00
NOVELLUS 17-136320-00
NOVELLUS 15-146021-00
NOVELLUS 10-293874-00
NOVELLUS 22-384497-00
NOVELLUS 60-116502-00
NOVELLUS 27-158946-00
NOVELLUS 71-161391-00
NOVELLUS 80-164086-99
NOVELLUS 00-684290-00
NOVELLUS 18-034943-00
NOVELLUS 17-032783-00
NOVELLUS 03-131453-00
NOVELLUS 21-041953-17
NOVELLUS 20-00300-00
NOVELLUS 22-051915-00
NOVELLUS 34-133701-00
NOVELLUS 22-028185-00
NOVELLUS 17-050183-00
NOVELLUS 04-129182-00
NOVELLUS 15-00292-01
NOVELLUS 15-00972-00
NOVELLUS 03-00219-00
NOVELLUS 15-00500-00
NOVELLUS 03-00139-08
NOVELLUS 22-126995-00
NOVELLUS 15-11616-04
NOVELLUS 03-00250-00
NOVELLUS 38-032598-00
NOVELLUS 15-00373-00
NOVELLUS 05-145829-00
NOVELLUS 17-129420-00
NOVELLUS 15-00216-01
NOVELLUS 15-00663-00
NOVELLUS 15-00662-00
NOVELLUS 16-00047-00
NOVELLUS 03-00093-00
NOVELLUS 15-029930-00
NOVELLUS 34-029304-00
NOVELLUS 15-110268-00
NOVELLUS 03-00225-00
NOVELLUS 03-00045-03
NOVELLUS 15-00012-01
NOVELLUS 03-028145-00
NOVELLUS 03-137104-01
NOVELLUS 19-10095-00
NOVELLUS 03-00021-02
NOVELLUS 03-00131-02
NOVELLUS 16-034010-00
NOVELLUS 03-00021-03
NOVELLUS 03-00021-05
NOVELLUS 03-00021-06
NOVELLUS 03-00021-07
NOVELLUS 60-00022-00
NOVELLUS 22-110428-00
NOVELLUS 15-106398-00
NOVELLUS 17-00174-00
NOVELLUS 19-00033-00
NOVELLUS 02-10068-01
NOVELLUS 15-00138-00
NOVELLUS 15-00140-00
NOVELLUS 15-00412-00
NOVELLUS 15-00538-00
NOVELLUS 60-050182-00
NOVELLUS 15-00122-01
NOVELLUS 34-00227-00
NOVELLUS 19-00178-00
NOVELLUS 17-024672-00
NOVELLUS 03-00042-00
NOVELLUS 15-00665-00
NOVELLUS 15-032204-00
NOVELLUS 03-120613-00
NOVELLUS 60-72258-00
NOVELLUS 22-10022-00
NOVELLUS 10-00331-00
NOVELLUS 10-120287-37
NOVELLUS 10-120296-72
NOVELLUS 60-00134-00
NOVELLUS 15-11090-00