Parts For Sale NOVELLUS F03-87585 NOVELLUS F03-87585 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS F03-87585 Manufacturer NOVELLUS Part Number F03-87585 Description VAT Throttle VALVE for LoadLock R Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 – Other NOVELLUS Parts 20-00248-00 Spacer #5 Shaft x 0.060" TK 02-00216-00 PCB TC FILTER BOX ASSY INSTALLATION POSSIBLE ON: NOVELLUS C1 15-00699-01 FORK, FINGER 7.5" 22-00605-00 BEARING,BALL,.375ODX.125IDX.15 05-50033-00 KIT, CASSETTE HOOKS/SENSORS R27-278209-00 GENERATOR 5.0KWAE PDX5000 21-051116-20 SCREW, SCHS 10-32 1 15-10899-00 SPRING SEAL PLATE 16-117928-00 PVD Kit Components in Process Kit ComponentsRing, Anode, HCM 15-00553-31 Shim Heater .031" Flat 05-126872-00 KIT, CPEC, 200MM NOTCHED 15-00409-00 SEE 15-032014-00
