Parts For Sale NOVELLUS CA28 NOVELLUS CA28 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS CA28 Manufacturer NOVELLUS Part Number CA28 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other NOVELLUS Parts 16-00105-00 RS: 227-968 15-054434-03 EXCLUSION RING, 200 MM, 2.50 MM, OH 17621-01 Plate gas dist. 97-14s-9p 15-033947-00 Protective E-Chuck Cover Ceramic (PEC) 27-047499-00 Power Supply, 3156012-101, 2.5KW, 400KHz 31-00176-00 GASKET,1/8DIA,WIRE MESH RF SHL 03-7652-00 19-00267-01 Rotation motor concept one C-type NEMA size 23, C57-51 77547-R1/39 03-024324-00
