Parts For Sale NOVELLUS 966651 NOVELLUS 966651 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 966651 Manufacturer NOVELLUS Part Number 966651 Description SENSOR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 FR Other NOVELLUS Parts 22-10018-00 Seal Door Loadlock 15-250878-00 Screw Holder Retaining 33-263345-00 Sanyo Denki T730-042E59 DC Servo Motor 27-00148-00 VALVE,THROT,2",MKS 22-00299-00 Bearing Cam Follower 21-145888-20 SCRW,BUT,10-32x1.25 SILVER 17-00260-00 17-00260-00 BASE, KEYBOARD 233-4148-86 CONTROLLER PM 250 C2 ALTUS 22-00658-00 O-RING, 7.45IDX275W, KALREZ 22-10326-00 O-RING? .139X1.984 02-00397-00 Harness Assembly Sensor 26.5" 02-140949-00 Novellus 02-140949-00 Main system start-stop module , S 1009
