Parts For Sale NOVELLUS 966651 NOVELLUS 966651 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 966651 Manufacturer NOVELLUS Part Number 966651 Description SENSOR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 FR Other NOVELLUS Parts 19-00266-01 MOTOR CX 57 51S MOD CP*C57-51-MO INSTALLATION POSSIBLE O ... 22-00256-00 O-Ring 3 1/2" ID x 3 3/4" OD x 1/8" W 15-391861-30 PIN,MCA,SAPH,3/16DIA,0.8143IN,1 FLAT END 22-00326-00 O-RING,SP,.275 x 86.25 LG,BUNA 21-041270-12 Screw Skt Hex 1/4-20 X 3/4 SS 15-00982-00 SHAFT SPINDLE 15-127251-01 COVER PLATE 22-00006-00 Filter, Wafergard,LP mini 1/4" VCR 27-00010-01 TC,TYPE'J',RIGID,1/8 DIA x 12L OMEGA 27-00010-01 15-032700-00 SHAFT, GENEVA FLAG,200MM 15-00702-00 PLATE, FORK RETAINER, TOP, 200MM 27-00148-01 Load Lock Throttle Valve