Parts For Sale NOVELLUS 5866RT3SLM NOVELLUS 5866RT3SLM Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 5866RT3SLM Manufacturer NOVELLUS Part Number 5866RT3SLM Description Ar MFC Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other NOVELLUS Parts 20-00286-00 STANDOFF,10-32 x 2.00,M-F,.38 27-260179-00 968 (2) ECI TECHNOLOGY 2.5 ML ES GLASS SYRINGE LU70250 N ... 22-00655-00 VALVE, DIAPHRAM, NUPRO 19-106732-01 ELECTRIC MOTOR SERVICE 30R2BECI-D3 VOLTS: 115 AMP: 28/30 ... 15-11263-02 View Port Window STI Quartz with Sapphire Coating 17-00260-00 17-00260-00 BASE, KEYBOARD 22-00236-00 Novellus 22-00236-00 O-ring AS-443 16-401000-01 PLATE,CHANNEL,GAS,SHD,ANODIZED 02-134129-30 KF 16 Centering Seal, Orifice 030 Novellus 02-134129-30 22-00006-00 Filter, Wafergard,LP mini 1/4" VCR 20-155073-00 NEW Brooks 002-8904-02 End effector assy, 2 piece, 13.08 ... 02-292162-00 Digital Dynamics Inc. Coil Mon lxt HDSIOC NOVELLUS 02-29 ...