Parts For Sale NOVELLUS 5866RT3SLM NOVELLUS 5866RT3SLM Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 5866RT3SLM Manufacturer NOVELLUS Part Number 5866RT3SLM Description Ar MFC Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other NOVELLUS Parts 15-024611-00 PADDLE 200MM 03-137155-02 CABLE ASSY,R/LL,WFR PRES,VCTR 22-10527-00 Brooks 5964 series MFC, N2 gas, 0-10 SLPM, novellus 22-1 ... 17-126293-01 PLATE LOWER ( SPEED GASBOX ) 405*20*5mm 22-045331-00 Latch, Draw |Southco 22-10329-00 n/a 03-256086-00 Pump Spin Board 04-717647-01 NOVELLUS 04-717647-01 SHIELD, LOWER (USE WITH W9440317) ... 16-253739-00 Gas Ring 300mm 0700-727372 SEAL, SLINGER 15-032939-00 Excl Ring 200mm 2.25mm OH Semi 10-033595-00 Tube Assy. Capacitance Manometer, Adapter
