Parts For Sale NOVELLUS 5866RT3SLM NOVELLUS 5866RT3SLM Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 5866RT3SLM Manufacturer NOVELLUS Part Number 5866RT3SLM Description Ar MFC Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other NOVELLUS Parts 16-272249-00 SPACER 4INCH VAC FORELINE THROTTLE GATE VLV 15-00701-00 Plate Fork Retainer Bottom 150mm 16-034139-00 TUBE,INJECTOR 15-032014-00 WINDOW, ETCH RESISTENT QUARTZ 15-01052-00 Paddle 17-00260-00 17-00260-00 BASE, KEYBOARD 01-056070-00 Wafer Handling Module 22-10326-00 O-RING? .139X1.984 15-119059-00 Screw Cap Nickel 1/4-20 x .25lg 02-124151-00 Novellus LOGOSOL Lid Lift Controller 02-124151-00 Rev 4 02-140949-00 Novellus 02-140949-00 Main system start-stop module , S 1009 20-155073-00 NEW Brooks 002-8904-02 End effector assy, 2 piece, 13.08 ...
