Parts For Sale NOVELLUS 22-10521-01 NOVELLUS 22-10521-01 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 22-10521-01 Manufacturer NOVELLUS Part Number 22-10521-01 Description MFC,5SLM,C2F6,BRKS,MET Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other NOVELLUS Parts 951173 AIR CYLINDER, ASSY. 15-00457-00 SCREW, NICKEL, 10-32 x 24 HEATER ELECTRODE 22-00325-00 Seal Outer Lip Indexer 15-103651-00 RING, GUARD,C BORE,200 MM, STD-PUR OPM: APPLIED CERAMIC ... 17-126293-01 PLATE LOWER ( SPEED GASBOX ) 405*20*5mm 15-00534-00 FLANGE, BRAKE 22-045331-00 Latch, Draw |Southco 04-717647-01 NOVELLUS 04-717647-01 SHIELD, LOWER (USE WITH W9440317) ... 20-164114-00 20-164114-00 SPRING 15-032451-00 Window Chamber Lexan 02-111446-00 ASSY,SPINDLE CNTRL PCB 10-033595-00 Tube Assy. Capacitance Manometer, Adapter