Parts For Sale NOVELLUS 22-052164-00 NOVELLUS 22-052164-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 22-052164-00 Manufacturer NOVELLUS Part Number 22-052164-00 Description VERIFLOW VALVE, 43900647 (7000WSI) Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 13.0 US Other NOVELLUS Parts 27-257138-00 Brooks 13501-099-25 PCB New, OEM spare Latch PCB Fixload ... 15-250878-00 Screw Holder Retaining 22-10413-00 O-RING,2-232,VITON V747-75 16-033931-00 SHOWER HD PINNED 200,WLDMNT(CLEANED) 15-2666 TIMING BELT,1/8W x 6.0,Z-BOT I&II(E 233-4148-86 CONTROLLER PM 250 C2 ALTUS 22-10326-00 O-RING? .139X1.984 15-00385-00 NUT, NICKEL, 10-32 HEX HEAD 21-041267-10 Screw Skt Hex 8-32 X 5/8 SS 14738-01 Bubbler Quartz 02-140949-00 Novellus 02-140949-00 Main system start-stop module , S 1009 27-402813-00 O-Ring, SAE-385