Parts For Sale NOVELLUS 22-052164-00 NOVELLUS 22-052164-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 22-052164-00 Manufacturer NOVELLUS Part Number 22-052164-00 Description VERIFLOW VALVE, 43900647 (7000WSI) Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 13.0 US Other NOVELLUS Parts 15-250878-00 Screw Holder Retaining 22-00325-00 Seal Outer Lip Indexer 15-108330-00 SPRING, D PEDISTAL, CERAMIC WDEP 19-034573-10 BEARING, 2.50 OD KAYDON 19-034573-10 15-2666 TIMING BELT,1/8W x 6.0,Z-BOT I&II(E 233-4148-86 CONTROLLER PM 250 C2 ALTUS 22-10326-00 O-RING? .139X1.984 02-140949-00 Novellus 02-140949-00 Main system start-stop module , S 1009 02-106507-00 (C2) Spindle 8" 02-300478-00 Inova Heater 300mm 27-402813-00 O-Ring, SAE-385 00-682938-00 SHIELD, OUTER SUPPORT
