Parts For Sale NOVELLUS 22-052164-00 NOVELLUS 22-052164-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 22-052164-00 Manufacturer NOVELLUS Part Number 22-052164-00 Description VERIFLOW VALVE, 43900647 (7000WSI) Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 13.0 US Other NOVELLUS Parts 950609 MOTOR, AC 2700 RPM SERVO 15-250878-00 Screw Holder Retaining 15-2666 TIMING BELT,1/8W x 6.0,Z-BOT I&II(E 15-01104-00 Screw 10-32 x .75 Ni (0.100 Shoulder) 233-4148-86 CONTROLLER PM 250 C2 ALTUS 22-10326-00 O-RING? .139X1.984 03-00288-02 CABLE ASSY,CA57 RF (36FT) 15-00680-00 Sleeve Flanged AC Feedthrough Ceramic 22-00006-00 Filter, Wafergard,LP mini 1/4" VCR 02-140949-00 Novellus 02-140949-00 Main system start-stop module , S 1009 15-11108-00 27-402813-00 O-Ring, SAE-385