Parts For Sale NOVELLUS 20-164114-00 NOVELLUS 20-164114-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 20-164114-00 Manufacturer NOVELLUS Part Number 20-164114-00 Description 20-164114-00 SPRING Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other NOVELLUS Parts 03-00110-00 CABLE ASSY,CA25 Cassette Stage Block 02-134263-00 Novellus ESC 17-034553-00 COVER, FRAME 290*130*20mm 27-053701-00 PWR SPLY,TM ROBOT 43-13-1-24 15-325835-00 Plate Fork Bottom 15-00700-00M 03-132056-00 NOVELLUS 03-132056-00 PCB ASSY, CDM SENSORS BOARD 04-709559-01 RING, CERAMIC RETAINER 02-289943-00 Feedthru Electrical 10-103884-00 Tube Assy, V19 to V37