Parts For Sale NOVELLUS 15-146021-00 NOVELLUS 15-146021-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 15-146021-00 Manufacturer NOVELLUS Part Number 15-146021-00 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other NOVELLUS Parts 17-140885-00 SHIELD 15-00410-00 WINDOW UV FILTER 02-113639-00 MODULE CINTROLLER 16-144558-00 SHIELD, BARREL 17-136320-00 PLENUM, FLOATING 27-00127-00 Thermocouple Type E LG 16-140875-00 SHIELD, WAFER 19-00148-00 GEAR, ANTI-BACKLASH-PRIM. 19-00267-01 Rotation motor concept one C-type NEMA size 23, C57-51 22-153909-00 O-RING,.139 XSECT X 17.69 ID 16-126665-01 SHIELD, 15LB, ESC TABLE 16-121171-01 SHIELD