Parts For Sale NOVELLUS 15-146021-00 NOVELLUS 15-146021-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 15-146021-00 Manufacturer NOVELLUS Part Number 15-146021-00 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other NOVELLUS Parts 15-034142-00 Plate, Clamp, Gasline, Front 90*15*10mm 15-00309-01 Hanger Nozzle 1.50" (200mm) 61-350028-02 SENSOR LI, DL WH, -30L/, -10, /4FLAR, ELL2 34-17014-10 34-17014-10 RF BOX 22-101315-00 Spacer Bushing Split Spindle 04-732104-01 NOVELLUS 04-732104-01 CHUCK, ESC, W / NOTCHES 16-00098-00 Strap Heater Insulated Long Standard 2100-717769 FIXTURE, PAD COND. ALIGMENT, NEW OEM 06-0142 Showerhead Disk 17-156076-00 Bracket, Sol, He-ATC, VC11-VC13 950776 LOAD CELL,INTEGRAL AMP 20-10150-00 BUBBLE LEVEL