Parts For Sale NOVELLUS 15-112664-00 NOVELLUS 15-112664-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 15-112664-00 Manufacturer NOVELLUS Part Number 15-112664-00 Description Plate Base Showerhead Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other NOVELLUS Parts 21-042024-12 Washer Lock 1/2 SST 19-00154-01 HTR BLK,SLOTTED,C1,NO PINS,NO SCRIBE,MOD 02-257120-00 ASSY,ESC,200MM 6 PIN,C2SPD-S Cassette Stage Block 15-00475-00 Insulator Gas Feedthru Ceramic 17-034553-00 COVER, FRAME 290*130*20mm 43-13-1-24 15-110411-00 Window Sapphire 19-034573-04 BEARING, LINEAR/ROTARY 1" WTM 15-046814-00 RING,MANIFOLD, CHAMBER 10-323959-00 NEW NOVELLUS P/N: 10-323959-00 REV: B 19-034573-08 Bearing 1.5 OD