Parts For Sale NOVELLUS 15-01166-00 NOVELLUS 15-01166-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 15-01166-00 Manufacturer NOVELLUS Part Number 15-01166-00 Description 5 INCH ARM Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 3.0 JP Other NOVELLUS Parts 22-136510-00 O-Rings in ALL CATEGORIESO-RING, 2-165, CHEMRAZ SC513 22-00631-00 Assembly Seal 15-289421-00 Ring Wafer Lift 02-00343-02 Harness Assembly Sensor 12.0" 60-122735-00 VALVE R SPEED ROUGH ISO REPA 03-149330-00 Cable Assy, ESC High Voltage 0125-112097 COMPUTER,676 ENDPT MICROBX ICS PENT INSTALLATION POSSIBL ... 04-712159-01 SHIELD, AY L/L RAM 02-00170-00 Wafer on Paddel 02-317624-00 Novellus 300mm/325mm Top Level Speed ESC Electrostatic C ... 15-00385-00 NUT, NICKEL, 10-32 HEX HEAD 22-101315-00 Spacer Bushing Split Spindle