Parts For Sale NOVELLUS 15-00287-00 NOVELLUS 15-00287-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 15-00287-00 Manufacturer NOVELLUS Part Number 15-00287-00 Description SPACER,PLT UPPER Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 3.0 US Other NOVELLUS Parts 20-00258-00 WASHER,WAVY,.650ID x .790OD 19-00101-02 BOX,HTR FEEDTHRU 15-134123-01 Injector 2" STI Beveled End 15-108174-00 CUP, SCREW COVER 15-120150-04 Nanofill Injector 2.8" 38-00048-00 38-00048-00 CABLE ASSY, 2BC-BNC-24 34-173589-00 SENSOR AND ACCESSORY MECHANICAL SENSOR 34-173589-00 15-105508-00 Ring 15-325836-00 Plate Fork Top 22-10518-00 22-10518-00 Core, MFC, BROOKS 5964, 2 SLM, 02-144241-00 Sensor Plate Assy, Left Loadlock 19-00157-00 PCB, DIGITAL I/O 519A #2