Parts For Sale NOVELLUS 15-00052-01 NOVELLUS 15-00052-01 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 15-00052-01 Manufacturer NOVELLUS Part Number 15-00052-01 Description HSG, INNER SHAFT Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other NOVELLUS Parts 60-119980-00 60-119980-00 PRESSURE CONTROLLER 15-391861-29 PIN,MCA,SAPH,3/16DIA,0.8141IN,1 FLAT END 02-047544-00 ASSY,PNEU BOARD,BANK P,ALT-S 15-391861-30 PIN,MCA,SAPH,3/16DIA,0.8143IN,1 FLAT END 02-288189-00 Lift Pin Actuator 300mm 15-00834-00 Lift pin WCVD 16-00092-00 wire Insulated Ceramic Bead Short 22-00343-00 Sleeve 3/8" O-Seal UltraTorr 61-340078-00 OEM SPARE, CBL, MANOMETER, B/O, DW, C3 VECTOR 15-107698-00 CAP, CERAMIC FEEDTHRU 22-10528-00 Valve, Monoblock, VCR, NC/NC 10-127711-00 TUBE ASSY,MAN A,UPPER,SEQ-X