Parts For Sale NOVELLUS 03-166473-04 NOVELLUS 03-166473-04 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 03-166473-04 Manufacturer NOVELLUS Part Number 03-166473-04 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other NOVELLUS Parts 22-00655-00 VALVE, DIAPHRAM, NUPRO 15-391861-29 PIN,MCA,SAPH,3/16DIA,0.8141IN,1 FLAT END 15-391861-30 PIN,MCA,SAPH,3/16DIA,0.8143IN,1 FLAT END 15-00386-00 WASHER #10 NICKEL PLATE .003-.005 THICK 19-00144-00 Gear 15-00685-00 Feedthrough 3/8: O-Seal UltraTorr 15-267139-00 Ceramic Shield Part of: INOVA, Preclean DFE Shield 5850E (5 SLM) NH3 MFC 15-032631-00 FLANGE, SPINDLE 31-00176-00 GASKET,1/8DIA,WIRE MESH RF SHL 0150-700184 DRIVER, STEP MOTOR PAD COND 7A 19-00147-00 Gear EXT.