Parts For Sale NOVELLUS 02-154487-00 NOVELLUS 02-154487-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 02-154487-00 Manufacturer NOVELLUS Part Number 02-154487-00 Description Degas Module Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 KR Other NOVELLUS Parts 15-289675-00 Insulator, Gas Distribution 15-289496-00 Block Wheel, Pedestal 15-00457-00 SCREW, NICKEL, 10-32 x 24 HEATER ELECTRODE 15-300579-00 ACP Nozzle Ceramic 300mm 20-01270-01 20-01270-01 PCB, VERITY ENDPOINT DETECTION 02-00024-00 02-00024-00 AC LINE FILTER ASSY, USED 15-00401-00 SPINDLE SHAFT, SS 71-052552-00 TOOL,ALIGNING,VAT VLV,SPD300MM A06-005-01 Quartz Shower Head 5" 15-266783-00 (modified) Modified Plunger Housing 03-7652-00 22-00606-00 O-RING,2-236,VITON V747-75