Parts For Sale NOVELLUS 02-154487-00 NOVELLUS 02-154487-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 02-154487-00 Manufacturer NOVELLUS Part Number 02-154487-00 Description Degas Module Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 KR Other NOVELLUS Parts 15-024611-00 PADDLE 200MM 17-00260-00 17-00260-00 BASE, KEYBOARD 16-00098-00 Strap Heater Insulated Long Standard 16-401000-01 PLATE,CHANNEL,GAS,SHD,ANODIZED 22-00288-00 T Seal Viton Teflon Backing 02-134129-30 KF 16 Centering Seal, Orifice 030 Novellus 02-134129-30 15-00924-00 CLAMP,BAR,HUB,EXCL OPTION 16-126462-00 NOVELLUS 16-126462-00 SHIELD, 15LB, SELF ALIGN, EE REV.1 04-129845-00 Application: SPEED 15-050160-41 TUBE,INJECTOR,HI-PURITY,4.13" 20-155073-00 NEW Brooks 002-8904-02 End effector assy, 2 piece, 13.08 ... 02-292162-00 Digital Dynamics Inc. Coil Mon lxt HDSIOC NOVELLUS 02-29 ...