Parts For Sale NOVELLUS 02-115278-00 NOVELLUS 02-115278-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 02-115278-00 Manufacturer NOVELLUS Part Number 02-115278-00 Description ACTUATOR KIT Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other NOVELLUS Parts 15-00398-00 Screw Support Heater 19-00149-00 GEAR, ANTI-BACKLASH-SEC. 22-00326-00 O-RING,SP,.275 x 86.25 LG,BUNA 34-125023-00 Ferrite Filter, 250 OHM 10-103895-00 TUBE ASSY,MFC TO BMANF 22-10329-00 n/a 03-256086-00 Pump Spin Board 15-00385-00 NUT, NICKEL, 10-32 HEX HEAD 00-674494-01 SPRING, CERAMIC SHIELD (10 PER PACK) 70-00054-00 CASSETTES METAL 125MM 15-01103-00 Shaft Lift Ring 02-111446-00 ASSY,SPINDLE CNTRL PCB
