Parts For Sale NOVELLUS 02-115278-00 NOVELLUS 02-115278-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 02-115278-00 Manufacturer NOVELLUS Part Number 02-115278-00 Description ACTUATOR KIT Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other NOVELLUS Parts 03-00018-00 ASSY,PWR BOARD 5850E (5 SLM) NH3 MFC 22-00090-00 Filter, 0.2 micron, High Flow -Flow Solutions -SGLF6101V ... 02-253822-00 NOVELLUS MC3 CONTROLLER INTERFACE BOARD 02-253822-00 REV.A 15-00475-00 Insulator Gas Feedthru Ceramic 02-00163-00 Kit Assembly Fork Spindle 15-100263-00 ROBOT BLADE 200MM HI PURI 05-111902-01 KIT,PM RF STRAP 2 BOLT 15-325836-00 Plate Fork Top 15-107698-00 CAP, CERAMIC FEEDTHRU 02-300478-00 Inova Heater 300mm 17-026437-00 Shutter, Exit, Vac, Upper, ALTUS-S
