Parts For Sale NOVELLUS 01-3113 NOVELLUS 01-3113 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details NOVELLUS 01-3113 Manufacturer NOVELLUS Part Number 01-3113 Description PLATEN LOCATOR Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 7.0 US Other NOVELLUS Parts 22-266894-00 NOVELLUS Seal, Metal, Face, Gas, 300mm 15-108330-00 SPRING, D PEDISTAL, CERAMIC WDEP 16-10270-00 Cover, Heater Feedthru Box 22-00118-00 O-RING 1.234" X 0.139" VITON 15-032502-00 15-032502-00 Lift pin 03-00125-01 Match ca140-1 04-717647-01 NOVELLUS 04-717647-01 SHIELD, LOWER (USE WITH W9440317) ... 15-00742-00 TUBE TUBE,CENTER 15-00742-00 A1N5 NOVELLUS PECVD 0150-700184 DRIVER, STEP MOTOR PAD COND 7A 78-0124 O-RING, 5-116, .741 ID X .104 W, KALREZ 00-674932-00 15-00567-00 Tube ,TC ,1/8"ID ,ceramic
