Parts For Sale MATTSON 566-09132-00 MATTSON 566-09132-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 566-09132-00 Manufacturer MATTSON Part Number 566-09132-00 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 6.0 US Other MATTSON Parts 559-12929-00 PCB ASY,PC-AT,ANALOG IN,UEI 1007699 mattson 1007699 bracket 913-10054-00 O-RING, VITON 5099202236 1001469 Shield O-Ring 263-23201-00 914-14012-00 GASKET, 3-PORT 497-00477-06 17000018 IGBT GATE-FUSE BOARD 263-00779-00 451111 Mattson Rear Chamber Assembly, New Power Plasma, Unit, B ... 914-18006-00 37500003 Filter Micro Inline gas -, Wafergard II