Parts For Sale MATTSON 566-09132-00 MATTSON 566-09132-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 566-09132-00 Manufacturer MATTSON Part Number 566-09132-00 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 6.0 US Other MATTSON Parts 58600046 ROTATION TRAY 12, 3mm DOUBLE PACKAGE INSTALLATION POSSIB ... 165-00090-00 PCA DIGITAL I/O 58500053 300mm wafer pins 17mm lg. sharp 10° 57400002 Quartz Liner Top Mattson 2800 400-08909-00 58500029 PLATE LINER PLATE TOP SPACER 262-00002-00 ment Arm Spindle Mattson 255-03776-00 914-14011-00 57600014 plate gasdistribution-, rotation back 303-02685-00