Parts For Sale MATTSON 566-09132-00 MATTSON 566-09132-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 566-09132-00 Manufacturer MATTSON Part Number 566-09132-00 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 6.0 US Other MATTSON Parts 58600091 Quartz Pins 255-12307-00 Mattson 255-12307-00 ATM robot Z-axis interface PCB board 914-14010-00 VALVE,3 PORT,SINGLE SOLENOID 235-08790-00 KIT,RETROFIT,ROBOT SEAL HSG ASY 304-08775-00 165-13252-00 ANTI-HAMMER,DRAIN,VALVE,ASSY 182-74000-00 100 ' RF CABLES 933-14007-00 MOTOR,DC,ROBOT EXT & ROTATE 913-11003-00 Seal Lip 3006203 CABLE ASSY,SWITCH,TOP PLATE COOL INTLK 57600014 plate gasdistribution-, rotation back 914-11002-00