Parts For Sale MATTSON 165-90000-00 MATTSON 165-90000-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 165-90000-00 Manufacturer MATTSON Part Number 165-90000-00 Description PCA, DIGITAL I/O BOARD M Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 US Other MATTSON Parts 152-00001-00 cassette door chamber 559-12929-00 PCB ASY,PC-AT,ANALOG IN,UEI 915-41001-00 THUMBSCREWS (10-32X1SS) 456-09434-00 GASKET,VCR,1/4NI,W/RETAINER 263-06185-00 COIL ASSY, SILVER PLATED 299-20000-00 Mattson, ASSY, PCB ICP PLASMA SENSE, A2, p/n 299-20000-00 280-23000-01 045-23049-00 263-01129-00 Rotating Cassettes Assy 263-00521-00 CABLE ASSEMBLY ROBOT INTERFACE 912-21001-00 PIN 2 ROBOT ALIGNMENT