Parts For Sale MATTSON 2002-0022 MATTSON 2002-0022 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 2002-0022 Manufacturer MATTSON Part Number 2002-0022 Description SWITCH, Z-AXIS, LIMIT Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other MATTSON Parts 58900068 Wafer Tray 6" 263-15570-01 913-11001-00 SEAL LIP FLANGED SHUTTLE LIFT SHAFT RFS3019 1011468 VBG Lambdasonde O2 Sensor adv Devicenet 913-10066-00 O-Ring Kalrez 933-14007-00 MOTOR,DC,ROBOT EXT & ROTATE 913-11003-00 Seal Lip 914-18005-00 914-14011-00 57600014 plate gasdistribution-, rotation back 914-18004-00 914-18004-00 CYLINDER PNEU