Parts For Sale MATTSON 2002-0022 MATTSON 2002-0022 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 2002-0022 Manufacturer MATTSON Part Number 2002-0022 Description SWITCH, Z-AXIS, LIMIT Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other MATTSON Parts 44000012 EDGE GUARD RING SI 8 4 SEGM. INSTALLATION POSSIBLE ON: M ... 456-01027-26 O-RING,1.859 ID X .139W,FLORO 58600046 ROTATION TRAY 12, 3mm DOUBLE PACKAGE INSTALLATION POSSIB ... 47800002 EDGE GUARD RING 6" 58500053 300mm wafer pins 17mm lg. sharp 10° 262-00002-00 ment Arm Spindle Mattson 914-14011-00 544-00024-00 Quartz Plasma Tube 57600014 plate gasdistribution-, rotation back 182-64000-00 Cable Assy #301 062-00002-00 Ceramic Standoff-Htr Block 303-02685-00