Parts For Sale MATTSON 2002-0022 MATTSON 2002-0022 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 2002-0022 Manufacturer MATTSON Part Number 2002-0022 Description SWITCH, Z-AXIS, LIMIT Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other MATTSON Parts 58500053 300mm wafer pins 17mm lg. sharp 10° 045-14596-00 635-02946-00 913-10066-00 O-Ring Kalrez 303-21228-00 456-08133-00 144-01000-00 FEED THROUGH, VACUUM ELECTRIC Rev : 01 Unit: EA 933-14007-00 MOTOR,DC,ROBOT EXT & ROTATE 57600004 GAS DISTRIBUTOR TYPE R INSTALLATION POSSIBLE ON: MATTSON ... 914-11002-00 255-19367-00