Parts For Sale MATTSON 2002-0022 MATTSON 2002-0022 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 2002-0022 Manufacturer MATTSON Part Number 2002-0022 Description SWITCH, Z-AXIS, LIMIT Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other MATTSON Parts 58600091 Quartz Pins 913-10031-00 O-RING, 1.987 ID X .103CS, VITION Rev : 02 Unit: PAK 141-00004-00 MATTSON 200 SHUTTLE HOUSING BEARING 255-12307-00 Mattson 255-12307-00 ATM robot Z-axis interface PCB board 933-14007-00 MOTOR,DC,ROBOT EXT & ROTATE 3006203 CABLE ASSY,SWITCH,TOP PLATE COOL INTLK 497-00512-08 914-14012-00 GASKET, 3-PORT 57600014 plate gasdistribution-, rotation back 303-22839-00 912-21001-00 PIN 2 ROBOT ALIGNMENT 914-11002-00