Parts For Sale LAM 853-015060-001 LAM 853-015060-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-015060-001 Manufacturer LAM Part Number 853-015060-001 Description SENSOR, TEMPERATURE, ASSY Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other LAM Parts 715-052464-001 LAM RESEARCH (LAM) 715-052464-001 COVER, LIGHT PCB, EDGE ... 839-011906-001 ELECTRODE, SILICON, 6" 716-331100-001 R. Edge 6" ESC, Fl Bot. CER For: LAM 853-015130-002 MINI-MATCH,,LAM 9600 715-012165-006 ARM,LOAD,ENT,6" TIGHT POCKET,715-012165-006 734-008819-001 O-ring 1 5/16 ID X 3/32 C/S 723-001205-006 SPACER RND .14 X .25 X .38 734-093789-001 Seal O-Ring Gate Chamber 839-011907-222 ELCTD,SI,8IN,LR,SM HOLE,LCR 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136