Parts For Sale LAM 853-012230-002 LAM 853-012230-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-012230-002 Manufacturer LAM Part Number 853-012230-002 Description GATE, INNER, DOOR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 715-011622-101 LIFTER WAFER, 4-PIN, FLEXIBLE 810-017030-005 ASSY PCB, GAS PANEL 734-092107-001 O-RING GATE SEAL 200 MM 723-001205-006 SPACER RND .14 X .25 X .38 734-093789-001 Seal O-Ring Gate Chamber 839-460152-006 LAM RESEARCH 6" HEATER 839-460152-006 724-077075-002 VACUUM ROBOT PICK 715-011753-003 715-011753-003 BAFFLE PLATE UPPER BAFFLE 131052003 SHIM, MYLAR, 0.010 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136