Parts For Sale LAM 853-012230-002 LAM 853-012230-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-012230-002 Manufacturer LAM Part Number 853-012230-002 Description GATE, INNER, DOOR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 715-495014-001 LINER CHAMBER TRNSN 723-001205-006 SPACER RND .14 X .25 X .38 734-090743-001 O-RING VITON 4.47X1.78 839-101870-002 853-031469-004 OLD P/N 853-031469-001 810-017015-001 REV A 724-077075-002 VACUUM ROBOT PICK 768-090914-001 SWITCH, VACUUM 131052003 SHIM, MYLAR, 0.010 739-900064-002 QUAD SEAL .070 ID PERIMETER 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136