Parts For Sale LAM 853-005902-001 LAM 853-005902-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-005902-001 Manufacturer LAM Part Number 853-005902-001 Description ASSY CIRCUIT SOFT PUMP DOWN Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 6.0 US Other LAM Parts 716-330121-001 LAM, 716-330121-001, Window Shaped Ceramic FXD GAPNWindo ... 720-090943-010 Bolt Confinement Ring Kel F LAM 4520 716-028668-262 PLATE, TOP CLAMP WAFER DOME SHADOW 723-001205-006 SPACER RND .14 X .25 X .38 734-007460-001 O-RING VITON BK 177,47X2,62; 6.987 ID X 0.103 C/S 839-101870-002 716-800842-008 NSR,FOC R,SHLD 200MM 734-092041-001 O-Ring Flouro Silicon Spacer Quartz 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 715-012568-002 ROBOT LAM RESEARCH 715-012568-002 ASSY SHUTTLE SPATULA D ...