Parts For Sale LAM 853-005902-001 LAM 853-005902-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-005902-001 Manufacturer LAM Part Number 853-005902-001 Description ASSY CIRCUIT SOFT PUMP DOWN Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 6.0 US Other LAM Parts 716-008645-005 Cover Ring Quartz HP 713-057586-001 PLUG,RTD,THRM CTRL PL 713-028487-001 Vespel Confinement Ring 4 week lead 715-330773-001 COVER TOP LWR CHMBR HOUSING 716-021856-001 CHEMRAZ, GASKET 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 724-077075-002 VACUUM ROBOT PICK 715-140166-003 131052003 SHIM, MYLAR, 0.010 810-017086-018 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136