Parts For Sale LAM 853-005902-001 LAM 853-005902-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-005902-001 Manufacturer LAM Part Number 853-005902-001 Description ASSY CIRCUIT SOFT PUMP DOWN Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 6.0 US Other LAM Parts 716-021323-001 Funnel Quartz Power Supply Module 713-057586-001 PLUG,RTD,THRM CTRL PL 716-011009-001 Window Quartz (The Left Side) 853-015762-001 SWITCH,(APM ARM)CONVUM CV-05HSCK SINGLE STAGE VACUUM PUMP 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-347266-002 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-017631-002 ASSY, VAC SW WASCO 853-017631-002 839-011907-902 ELECTRODE, SILICON,HI TEMP,POLISH,8 INCH 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136