Parts For Sale LAM 853-005902-001 LAM 853-005902-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-005902-001 Manufacturer LAM Part Number 853-005902-001 Description ASSY CIRCUIT SOFT PUMP DOWN Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 6.0 US Other LAM Parts 716-030135-001 Focus ring, 8" ESC 716-801568-002 Window Quartz 716-540198-001 Etch Kit Components in Process Kit ComponentsWINDOW, F S ... 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 766-009447-001 LAM 766-009447-001 VALVE,SOLENOID,4 WAY PCB 000-061 REV M 810-017006-0 PCB Temp Sensor 730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 718-094523-261 ASSY, ELCTD,ESC 6" MJR FLT LT 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136
