Parts For Sale LAM 853-005902-001 LAM 853-005902-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-005902-001 Manufacturer LAM Part Number 853-005902-001 Description ASSY CIRCUIT SOFT PUMP DOWN Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 6.0 US Other LAM Parts 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 716-028414-016 RING FOCUS RING 716-028414-016 A4R1 RAINBOW 4420 12-8892-013 ASSY,CURLEY WIRE,PRE-PROD. 839-800327-315 Etch FLEX Talon Ect. LAM 2300 ESC 300mm 723-001205-006 SPACER RND .14 X .25 X .38 716-800842-008 NSR,FOC R,SHLD 200MM 9150230 n/a 661-097953-001 UV Lamp, Microwave Strpr, Astex FI30005, Rev.E 724-077075-002 VACUUM ROBOT PICK 715-012101-006 WAFER HOLDER 715-130092-006 XLL EXIT ARM 3 DIFFERENT TYP ... 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136