Parts For Sale LAM 853-005902-001 LAM 853-005902-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-005902-001 Manufacturer LAM Part Number 853-005902-001 Description ASSY CIRCUIT SOFT PUMP DOWN Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 6.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 716-331142-001 Ring, edge, top, wide 715-801021-838 LINER. 715-801021-838,POLY LINER 734-090633-001 713-011585-001 COVER, CLAMP BOLT ('A DIM. = .1) 724-077075-002 VACUUM ROBOT PICK 720-443208-010 6-32 x 5/8" Slotted Flat Head Screw 131052003 SHIM, MYLAR, 0.010 810-017031-004 ASSY, PCB, ADIO-AO INSTALLATION POSSIBLE ON: RAINBOW 4520 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136