Parts For Sale LAM 853-005902-001 LAM 853-005902-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-005902-001 Manufacturer LAM Part Number 853-005902-001 Description ASSY CIRCUIT SOFT PUMP DOWN Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 6.0 US Other LAM Parts 716-008645-001 Etch Kit Components in Process Kit ComponentsCOVER, RING ... 713-057586-001 PLUG,RTD,THRM CTRL PL 16532-01 Plate Quartz Lamp 714-021739-001 Screen EMI/RFI Window Chamber 853-017805-045 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 724-077075-002 VACUUM ROBOT PICK 716-330915-001 ESC Insulator Ring 9408 Poly VAT 65 131052003 SHIM, MYLAR, 0.010 853-017631-002 ASSY, VAC SW WASCO 853-017631-002 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136