Parts For Sale LAM 853-017631-002 LAM 853-017631-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-017631-002 Manufacturer LAM Part Number 853-017631-002 Description ASSY, VAC SW WASCO 853-017631-002 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other LAM Parts 734-057609-016 LAM RESEARCH (LAM) 734-057609-016 O-RING REV. A 713-057586-001 PLUG,RTD,THRM CTRL PL 853-015130-002 MINI-MATCH,,LAM 9600 839-019090-608 LAM 608 ESC 853-004093-001 ASSY MOTOR DRIVE BELT 723-001205-006 SPACER RND .14 X .25 X .38 716-028668-261 LOWER WAFER CLAMP 716-140163-001 Hot Edge Ring or Focus Ring Insert 8" 718-092326-061 ELECTRODE, CAP MAJ FLT ESC 6" 724-077075-002 VACUUM ROBOT PICK 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136