Parts For Sale LAM 853-017631-002 LAM 853-017631-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 853-017631-002 Manufacturer LAM Part Number 853-017631-002 Description ASSY, VAC SW WASCO 853-017631-002 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 853-015130-002 MINI-MATCH,,LAM 9600 734-006337-001 O-RING, DURO QUAD-RING SEAL 723-001205-006 SPACER RND .14 X .25 X .38 724-077075-002 VACUUM ROBOT PICK 720-443208-010 6-32 x 5/8" Slotted Flat Head Screw 131052003 SHIM, MYLAR, 0.010 716-160255-002 Chamber Plasma Quartz 715-021483-001 PLATE FEEDTHRU, GAS RING 853-017939-001 Cable, Assembly Exit L/L SIG 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136 714-045743-809 Outer Liner