Parts For Sale LAM 601863 LAM 601863 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 601863 Manufacturer LAM Part Number 601863 Description PLATE, COVER, RF Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 713-057586-001 PLUG,RTD,THRM CTRL PL 715-021488-001 RETAINER LOWER BELL JAR 715-330825-007 ALUMINUM CHAMBER LINER 853-370186-001 CABLE OVERTEMP 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 810-017031R004 RFRB ASSY, PCB, ADIO-AO 724-077075-002 VACUUM ROBOT PICK 716-028447-002 DISK CERAMIC 810-017031-004 ASSY, PCB, ADIO-AO INSTALLATION POSSIBLE ON: RAINBOW 4520 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136