Parts For Sale LAM 601863 LAM 601863 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 601863 Manufacturer LAM Part Number 601863 Description PLATE, COVER, RF Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other LAM Parts 734-007359-001 O-RING, 14.0 ID X 1/8 C/S VITON 715-059638-803 LAM 715-059638-803 839-011906-001 ELECTRODE, SILICON, 6" 715-006439-001 Electrode, Airlock, LAM P/N 715-006439-001 713-057586-001 PLUG,RTD,THRM CTRL PL 853-370186-001 CABLE OVERTEMP 720-090943-010 Bolt Confinement Ring Kel F LAM 4520 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 853-170245-002 ASSY, PLASMA, ARSR, He BACKSIDE 724-077075-002 VACUUM ROBOT PICK 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136