Parts For Sale LAM 02-321648-00 LAM 02-321648-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 02-321648-00 Manufacturer LAM Part Number 02-321648-00 Description ASSY, HDISIOC2, VECTOR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 713-057586-001 PLUG,RTD,THRM CTRL PL 810-17006-001 TEMP.SENSOR B/D 810-015987-101 BOARD R PCB 15-391861-09 PIN,MCA,SAPH,3/16DIA,0.8101IN,1 FLAT END 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 766-009447-001 LAM 766-009447-001 VALVE,SOLENOID,4 WAY 715-330746-002 BSR CYLINDER PLUNGER PIN KIT 724-077075-002 VACUUM ROBOT PICK 716-443234-002 Etch Kit Components in Process Kit ComponentsRING, FOCUS ... 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 955-090225-001 Pad silicone rubber