Parts For Sale HITACHI 567-0552 HITACHI 567-0552 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI 567-0552 Manufacturer HITACHI Part Number 567-0552 Description SUPPORT PLATE Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 2.0 US Other HITACHI Parts IS3000 3-837467-01 O-RING (REPLACED BY 4-820960-01) 533-1001 END APERTURE KP-M1U Monochrome 2/3" CCD Camera 3-834400-90 Hitachi, INSULATION RING INNER, p/n 3-834400-90 3-834580-01 WAFER SUPPORT 2-826159-A KIT,LOADLOCK,STAGE 2-829526-03 Hitachi Electrode Head Cover, 2-829526-03 29K00006 PCB ADC-30 KRYTEK ABN111 PUSH BUTTON SWITCH ABN111 HT98218 Hitachi HT98218 Control PCB COM VER. A