Parts For Sale HITACHI 2-826159-A HITACHI 2-826159-A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI 2-826159-A Manufacturer HITACHI Part Number 2-826159-A Description KIT,LOADLOCK,STAGE Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 2.0 US Other HITACHI Parts IS3000 3-837467-01 O-RING (REPLACED BY 4-820960-01) 569-5558 Hitachi 569-5558 System I/O PCB N-VSCN S-9380 SEM 6824VV BEARING 533-1001 END APERTURE 1-807885 Hitachi 1-807885 PCB IL36-1 3-834580-01 WAFER SUPPORT 3-836509-02 PHOTO SENSOR 2-815888-11 566-1351 APERTUNE PLATE 3-8276276-06 O-RING V70 ABN111 PUSH BUTTON SWITCH ABN111