Parts For Sale HITACHI 560-1000 HITACHI 560-1000 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI 560-1000 Manufacturer HITACHI Part Number 560-1000 Description R ARM ROTATING MECHSM Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 TW Other HITACHI Parts IS3000 3-837467-01 O-RING (REPLACED BY 4-820960-01) SFC480CMO-4V4C2 MFC HBR 300 SCCM HT94219B Hitachi HT94219B PCB Circuit Board Ver. A 533-1001 END APERTURE 4-819370-02 AHI GASKET 4-819370-02 AHI 3-834580-01 WAFER SUPPORT 2-826159-A KIT,LOADLOCK,STAGE L456185 O-RING, AV-3 ABN111 PUSH BUTTON SWITCH ABN111 S4-86765-01 PLATE 4-808625-B SHIELD LINE BUFFER LID