Parts For Sale HITACHI 545-5521 HITACHI 545-5521 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI 545-5521 Manufacturer HITACHI Part Number 545-5521 Description EVAC, CONTROL BOARD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 KR Other HITACHI Parts IS3000 2-819065-001 SUSCEPTOR ( 8" ) 3-837467-01 O-RING (REPLACED BY 4-820960-01) 3-852688-01 Hitachi 300mm Quartz Sleeve 3-852688-01 HT94219B Hitachi HT94219B PCB Circuit Board Ver. A 533-1001 END APERTURE 4-819370-02 AHI GASKET 4-819370-02 AHI 3-822518-1 SHAFT FOR M308-ATW 2-826159-A KIT,LOADLOCK,STAGE 1-A01052-*A ELECTRIC DISCHARGE BLOCK S-88XX HV Controller with core exchange ABN111 PUSH BUTTON SWITCH ABN111