Parts For Sale HITACHI 3-85138-*A HITACHI 3-85138-*A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI 3-85138-*A Manufacturer HITACHI Part Number 3-85138-*A Description OPTO, ELECTRONIC SW Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 5.0 JP Other HITACHI Parts IS3000 2-819065-001 SUSCEPTOR ( 8" ) 3-837467-01 O-RING (REPLACED BY 4-820960-01) 200mm Wafer Prealigner Hitachi M-712E 200mm Wafer Prealigner 533-1001 END APERTURE 567-0036 567-0036 3-822518-1 SHAFT FOR M308-ATW 2-826159-A KIT,LOADLOCK,STAGE 2-823927-01 TWO STEP VALVE KD4TS-VC RYY-1 Hitachi RYY-1 PCB Circuit Board 2-821454-D Hitachi Electrode Head Vendor 2-821454-D ABN111 PUSH BUTTON SWITCH ABN111