Parts For Sale HITACHI 3-822287-A HITACHI 3-822287-A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI 3-822287-A Manufacturer HITACHI Part Number 3-822287-A Description L-TYPE VALVE Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Used 1.0 US Other HITACHI Parts IS3000 3-837467-01 O-RING (REPLACED BY 4-820960-01) 3-834580-01 WAFER SUPPORT 3-836509-02 PHOTO SENSOR 3-844857-04 CUSHION SHEET CV-103E008 ULPA FILTER 566-1351 APERTUNE PLATE W3150311 VACCUM PAD Y031 ABN111 PUSH BUTTON SWITCH ABN111 3-850223-01 INSULATOR RING 3-821414-03 PEN-RECORDER PAPER E-420379 CHUCK ARM