Parts For Sale HITACHI 566-1351 HITACHI 566-1351 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI 566-1351 Manufacturer HITACHI Part Number 566-1351 Description APERTUNE PLATE Status Available Approx. Qty 16 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 16.0 US Other HITACHI Parts IS3000 3-837467-01 O-RING (REPLACED BY 4-820960-01) 2-828424-B VACUUM TREE,EC2 UT-300 3-843646-01 Hitachi High Tech. 3-843646-01 Ceramic Insulation Ring H ... 1-807885 Hitachi 1-807885 PCB IL36-1 3-834580-01 WAFER SUPPORT 6301273648 GXH-1S spare parts Motor Head leveler 3-836509-02 PHOTO SENSOR 3-825221 CONVERSION FLANGE 3-850223-01 INSULATOR RING