Parts For Sale HITACHI 566-1351 HITACHI 566-1351 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI 566-1351 Manufacturer HITACHI Part Number 566-1351 Description APERTUNE PLATE Status Available Approx. Qty 16 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 16.0 US Other HITACHI Parts E-417152 BLOCK, ARM HOLD 3-823123-11 ORING,P50,PERFLOUR L-VALVE SFC480CMO-4V4C2 MFC HBR 300 SCCM 3-827667-17 O-RING P18 0B21253 SCSI Hard Drive 4-819370-02 AHI GASKET 4-819370-02 AHI 2-812828-E GAUGE,SENSOR HEAD,PIRANI, WP 3-832776-01 O-RING AS568A-280 3-822287-A L-TYPE VALVE I900SRT Hitachi I900SRT Wafer Inspection Transfer Robot 3-844743-A AIR HYDROCYLINDER (MODEL : MGQL20-B4377)