Parts For Sale HITACHI 566-1351 HITACHI 566-1351 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details HITACHI 566-1351 Manufacturer HITACHI Part Number 566-1351 Description APERTUNE PLATE Status Available Approx. Qty 16 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 16.0 US Other HITACHI Parts 2-822038-A TUBE,FLEX ER,CHILLER,LD 3-823123-11 ORING,P50,PERFLOUR L-VALVE S-8820 S-7840 560-1000 R ARM ROTATING MECHSM 3-843646-01 Hitachi High Tech. 3-843646-01 Ceramic Insulation Ring H ... 3-834400-90 Hitachi, INSULATION RING INNER, p/n 3-834400-90 2-821454-D Hitachi Electrode Head Vendor 2-821454-D V-DSP240/SP Hitachi S-9300 Etcher V-DSP240/SP SDS-9725 Circuit Board S-8800 LAN1-4 PCB BBE11-01 Hitachi BBE11-01 Backplane PCB M-712E