Parts For Sale AXCELIS GPS AXCELIS GPS Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS GPS Manufacturer AXCELIS Model GPS Part Number Description Axcelis Fusion GPS UV Bake Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 – Other AXCELIS Parts 170162054 1193490 SPINDLE DIRECT DRIVE ASSY W/CHARGE SENSOR 439031 439031 MOTOR DESC MOTOR GEAR 14-1 RATIO 6079970 CAP 150008320 PCB 170164281 H3500451 ELEMENT HOLDER 17125570 INA 57064 FLD RPL ONLY GROUND PLATE HE SPEC 170163113 LINER BOTTOM ARC CHAMBER W 170042741-C TRAY WAFER CERAMIC E41000136 1186811 MASTER OSCILLATOR