Parts For Sale AXCELIS 528121 AXCELIS 528121 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 528121 Manufacturer AXCELIS Part Number 528121 Description PLATE ASSY Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 170162054 286151 286151 QUARTZ PLATE-DISTRIBUTION, 8" ZEPHYR 150008320 PCB 170164281 170042741-C TRAY WAFER CERAMIC 1186811 MASTER OSCILLATOR 61S0026 IC PC847 FOR GSD'S 17121930 Cathode Nut - Moly, ELS 392171 TUBE, SAPPHIRE FUSION STRIPPER 7142-0015-0001 Axcelis / Eaton: 7142-0015-0001 Slit Beam Width Apertu< 170162071 281401 TUBE QUARTZ PROCESS FUSION