Parts For Sale AXCELIS 528121 AXCELIS 528121 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 528121 Manufacturer AXCELIS Part Number 528121 Description PLATE ASSY Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 549391 HV MODULE GEMINI GPL GES 170030780 Beam Stop 17064260 AXCELIS_17064260_GROUND ELECTRODE PLATE 17320560 PLATE, LINER 17142890 AXCELIS TECHNOLOGIES INC BREAK THERMAL 20S0054 CPU IN AIR ROBOT 170166090 GRAPHITE CL1TXT APERTURE, 8MM X 80MM, VCI 17115930 Plate Aperture, Linac VG 464911 BELT, TIMING UPPER ROTATE 170160061 170174465 170163417