Parts For Sale AXCELIS 528121 AXCELIS 528121 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 528121 Manufacturer AXCELIS Part Number 528121 Description PLATE ASSY Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 110121830 FEEDTHRY ASSEMBLY 4531800 AXCELIS 4531800 CHAMBER, ARC 11681436 17031590 INSULATOR 487961 PLATE, GAS DISPERSION QUARTZ 170164512 FRONT STOCK PLATE 17242360 BASE GRAPHITE COVER 11039040 11039040, HASE MONITOR BOX REPAIR, RF DETECTOR ASSEMBLY ... 170164645 11636546 17319620 PADDING CAP 4400213 4-40X3/16 HX/S/H/SET/S SC2-27