Parts For Sale AXCELIS 96321 AXCELIS 96321 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 96321 Manufacturer AXCELIS Part Number 96321 Description SCREW FUSION 150 BEZEL FUSION Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 6.0 US Other AXCELIS Parts 170165838 1193490 SPINDLE DIRECT DRIVE ASSY W/CHARGE SENSOR 6654-0002-0001 664991 170173343 1550-0016-0001 Filament Electrode, SKM 170168776 17127830 INSULATOR,FILAMENT FEEDTHROUGH 170157616 electrode feedthru cover(外) 17142890 AXCELIS TECHNOLOGIES INC BREAK THERMAL 170160841 17248090 FILAMENT CLAMP RHC INSULATOR