Parts For Sale AXCELIS 96321 AXCELIS 96321 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 96321 Manufacturer AXCELIS Part Number 96321 Description SCREW FUSION 150 BEZEL FUSION Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 6.0 US Other AXCELIS Parts 17161640 / 17117640 / 10014520 Bellows, V3, GSD, 50 Cons 170160818 17350000 PLATE 170165998 17170040 Extraction Electrode Insert 170156677 ARM CHUCK 8" 170154711 SHLD PEF FRONT 17099661 Outer Beam Dump /AC 7435-0001-0001 Thermocouple Gauge Tube DV-6M Type 170164643 85331 MAGNETRON ASSY-LOW FREQUENCY, HITACHI HITACHI 2M131 528121 PLATE ASSY