Parts For Sale AXCELIS 687361 AXCELIS 687361 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 687361 Manufacturer AXCELIS Part Number 687361 Description LID CHAMBER SML Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other AXCELIS Parts 4400743 AXCELIS ELS SCREW 10-32*3/8 S/H/C/S VENTED 3200363 VLV CRYO PURGE RLF 8033312CTI 150008320 PCB 170164281 17127650 Filament Shield 17292630 LINER REPELLER MOLY 17248060 FILAMENT BOTTOM RING 170163113 LINER BOTTOM ARC CHAMBER W 6500393 SWITCH MICRO V3-1102-D8 M 170042741-C TRAY WAFER CERAMIC 1504130 PCB OPTO-ISOLATOR 1504130 REV E 17S3577 AXCELIS_17S3577_GROUND ELECTRODE CARRIER