Parts For Sale AXCELIS 687361 AXCELIS 687361 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 687361 Manufacturer AXCELIS Part Number 687361 Description LID CHAMBER SML Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other AXCELIS Parts 17107960 SUPPORT FILAMENT 170164332 17279500 MASK INNER 1906890 BELLOWS WAFER HOLDER 17287860 Graphite Cathode Support 17B8383 SHIELD, SOURCE TAB 1909360 FILAMENT ELECTRON SHOWER 170049570 278662 EATON 278662 * USED * 170164636 58478 PCB 6692-0126-6000 RING, ELLIPTICAL FLOOD, 6", 6200A